Economically and Environmentally Responsible Synthesis of Silane Gas for Use in High-Purity Silicon Production

Motivation

• Silane gas is the primary precursor for all silicon based devices.
• The current synthesis method is very dangerous, costly, and toxic and involves large amounts of boiling chlorine.

Approach

• Using advanced processes, silane is directly synthesized using only a silicon source, hydrogen, and electricity in the EDA Reaction Cell.

Results

• Pilot scale reactor currently under construction